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Yield und Datenanalyse

convanitYield und Datenanalyse

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Improvement of Defect Engineering Methods

What we mean

Early detection of production related quality issues and proactive responses ensure low yield loss.

How we do it

Through methods like sampling, control strategy, defect to yield correlation, defect reporting, defect cataloguing , statistical analysis of defect data in relation to all other production relevant data we can create the most effective approach for you.

  • AI Applications
  • Software Solutions
  • Yield/Quality
  • Consulting
  • Data Integration
  • Implementation
  • Organization
  • Data Analytics
    • yield and reliability improvement
    • defect engineering
    • process control methodology
    • toolmonitoring
    • risk assessment
    • workshops
    • coaching
    • moderation

          Example 1

          Chip based Defect to Yield Correlation

          kill-rate-berechnung

          ‚Contigency table‘ Methode / Berechnung von Kill Rate & Defect Related Loss

          Requirements

          quality of inspection recipes, defect filter: large defects, Adder, Defects of interest per inspection step, low parametric yield loss

          Process step A

          defects-defect-engineering-projektbeispiel
          kill-rate-defect-engineering-projektbeispiel

          Kill Rate: 21%
          Defect Related Loss: 3,1%
          (All Binsorts)

          Example 2

          Yield correlation with intitial large detect filters

          large-defects-defect-engineering-projektbeispiel

          4 weeks data, one product, standard wafer, Large defects only, special defect related binsorts used, low yielding wafer excluded

          Example 3

          Large Defect Filter definition and optimization

          defect-filter-optimization-before-projektbeispiel

          Filter:
          Volume > 35 & Grade > 50

          Initial definition of Large Defect filter by inspection tool raw parameters: Volume/ Grade (DF inspection), DSIZE (BF inspection)

          defect-filter-optimization-volume-kill-rate
          defect-filter-optimization-grade-kill-rate

          New Filter:
          Volume > 25 & Grade > 50

          Optimization of Large Defect filter by kill rate and defective related yield loss analysis

          Initial definition of Large Defect filter by inspection tool raw parameters: Volume/ Grade (DF inspection), DSIZE (BF inspection)

          Optimization of Large Defect filter by kill rate and defective related yield loss analysis

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